Applied Materials CMP 5201 Chemical Mechanical Planarization (CMP) System

Overview

The Applied Materials CMP 5201 is a Chemical Mechanical Planarization (CMP) system designed for precision wafer planarization in semiconductor manufacturing. Commonly associated with the Mirra 3400 platform, this system is used to achieve highly uniform wafer surfaces during integrated circuit fabrication, improving layer flatness and enabling advanced semiconductor processing.

The CMP 5201 is suitable for semiconductor fabrication facilities, MEMS manufacturing, process development, and research laboratories requiring reliable wafer polishing and planarization capabilities.

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Key Features

• Manufacturer: Applied Materials (AMAT)
• Model: CMP 5201
• Platform: Mirra 3400
• Automation: AS 2000
• Equipment Type: Chemical Mechanical Planarization (CMP) System
• Category: Wafer Grinding, Lapping & Polishing
• Condition: Used Semiconductor Equipment
• Year of Manufacture: 2000

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Typical Applications

• Chemical Mechanical Planarization (CMP)
• Wafer surface planarization
• Integrated circuit manufacturing
• Semiconductor process development
• MEMS fabrication
• Interlayer dielectric polishing
• Copper and tungsten planarization
• University cleanroom laboratories
• Pilot semiconductor fabrication facilities

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Technology Advantages

• High-precision wafer planarization
• Excellent surface uniformity
• Consistent polishing performance
• Reliable process repeatability
• Suitable for research and pilot-scale manufacturing
• Proven semiconductor production platform

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Equipment Information

Parameter	Specification
Manufacturer	Applied Materials (AMAT)
Model	CMP 5201
Platform	Mirra 3400
Automation	AS 2000
Equipment Type	Chemical Mechanical Planarization (CMP) System
Category	Wafer Grinding, Lapping & Polishing
Process Type	Wafer Planarization / CMP
Year of Manufacture	2000
Equipment ID	9030286
Equipment Condition	Used

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Important Notice

Product image is provided for marketing and illustrative purposes only. The image shown may not represent the exact equipment available from the supplier. Actual equipment may vary in appearance, configuration, manufacturing year, installed options, accessories, specifications, and condition.

South Asia Semiconductor (SAS) provides semiconductor equipment sourcing and procurement services through trusted international suppliers. SAS does not claim ownership of the equipment unless explicitly stated. Equipment specifications, availability, pricing, condition, lead time, and final configuration are subject to confirmation by the supplier at the time of inquiry. Photographs, inspection reports, and detailed specifications of the actual available equipment can be provided to qualified buyers upon request.