SYSKEY PVD Sputtering System (4–6 Inch)

Overview

The SYSKEY PVD Sputtering System is a Physical Vapor Deposition (PVD) system designed for thin-film deposition on 4-inch to 6-inch wafers. The system is suitable for semiconductor research, MEMS fabrication, microelectronics manufacturing, advanced materials research, and pilot-scale production requiring high-quality sputtered thin films.

This sputtering system supports the deposition of conductive, insulating, and functional thin films for a wide range of semiconductor and nanotechnology applications. It is an excellent choice for universities, research laboratories, cleanrooms, and pilot semiconductor fabrication facilities.

---

Key Features

• Manufacturer: SYSKEY
• Model: PVD
• Equipment Type: PVD Sputtering System
• Category: Physical Vapor Deposition (PVD)
• Wafer Size: 4"–6"
• Condition: Used Semiconductor Equipment
• Year of Manufacture: 2008

---

Typical Applications

• Metal thin-film deposition
• Semiconductor device fabrication
• MEMS manufacturing
• Thin-film coating
• Research and process development
• Advanced materials research
• University cleanroom laboratories
• Pilot semiconductor fabrication facilities

---

Technology Advantages

• High-quality sputtered thin-film deposition
• Uniform coating performance
• Excellent process repeatability
• Supports multiple target materials
• Suitable for research and pilot-scale manufacturing
• Flexible process development capabilities

---

Equipment Information

Parameter	Specification
Manufacturer	SYSKEY
Model	PVD
Equipment Type	PVD Sputtering System
Category	Physical Vapor Deposition (PVD)
Wafer Size	4"–6"
Cathode Configuration	3 × 3
Power Supply	3-Phase, 220 V, 76 A
Equipment Dimensions	1450 × 1120 × 1900 mm
Year of Manufacture	2008
Equipment Condition	Used

---

Request a Quote

Interested in this equipment?

South Asia Semiconductor (SAS) provides international semiconductor equipment sourcing services for universities, research institutions, semiconductor manufacturers, foundries, and industrial customers.

Click Request a Quote to receive:

• Current availability
• Equipment condition
• Pricing
• Shipping options
• Technical specifications
• Installation support information

---

Important Notice

Product image is provided for marketing and illustrative purposes only. The image shown may not represent the exact equipment available from the supplier. Actual equipment may vary in appearance, configuration, manufacturing year, installed options, accessories, specifications, and condition.

South Asia Semiconductor (SAS) provides semiconductor equipment sourcing and procurement services through trusted international suppliers. SAS does not claim ownership of the equipment unless explicitly stated. Equipment specifications, availability, pricing, condition, and final configuration are subject to confirmation by the supplier at the time of inquiry. Photographs and detailed specifications of the actual available equipment can be provided to qualified buyers upon request.