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KOREA VACUUM TECH VTC PVD-1300 Sputtering System
Overview
The KOREA VACUUM TECH VTC PVD-1300 is a high-performance Physical Vapor Deposition (PVD) sputtering system designed for advanced thin-film deposition in semiconductor manufacturing, MEMS fabrication, microelectronics, and materials research. Featuring a high-vacuum chamber, multiple high-power sputtering supplies, and PLC-based automation, the system is well suited for research, pilot production, and industrial thin-film coating applications.
The VTC PVD-1300 provides a flexible deposition platform capable of supporting a wide range of metallic, dielectric, and functional thin-film processes with excellent process stability and repeatability.
Key Features
- Manufacturer: KOREA VACUUM TECH
- Model: VTC PVD-1300
- Equipment Type: PVD Sputtering System
- Category: Physical Vapor Deposition (PVD)
- Condition: Used Semiconductor Equipment
Typical Applications
- Semiconductor thin-film deposition
- Metal and alloy sputtering
- MEMS fabrication
- Microelectronics manufacturing
- Optical and functional coatings
- Process development
- Advanced materials research
- University cleanroom laboratories
- Pilot semiconductor fabrication facilities
Technology Advantages
- High-vacuum sputtering process
- Excellent thin-film uniformity
- Multi-target sputtering capability
- High process repeatability
- PLC-based automated process control
- Suitable for research and pilot-scale manufacturing
Equipment Information
| Parameter | Specification |
|---|---|
| Manufacturer | KOREA VACUUM TECH |
| Model | VTC PVD-1300 |
| Equipment Type | PVD Sputtering System |
| Category | Physical Vapor Deposition (PVD) |
| Turbo Molecular Pumps | 3 × Leybold TMP1600 |
| Roots Pump | 1 × Edwards Roots Pump |
| Rotary Pump | 1 × Edwards Rotary Pump |
| Sputtering Power Supplies | 4 × Advanced Converters MP20 (20 kW) |
| Bias Power Supply | 1 × Advanced Converters 18 kW |
| Mass Flow Controllers | 2 |
| Rotary Cage | 1 Set |
| Magnet Power Supply | Included |
| Control System | PLC with Computer |
| Operator Interface | Integrated Control Panel |
| Equipment Condition | Used |
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Important Notice
Product image is provided for marketing and illustrative purposes only. The image shown may not represent the exact equipment available from the supplier. Actual equipment may vary in appearance, configuration, manufacturing year, installed options, accessories, specifications, and condition.
South Asia Semiconductor (SAS) provides semiconductor equipment sourcing and procurement services through trusted international suppliers. SAS does not claim ownership of the equipment unless explicitly stated. Equipment specifications, availability, pricing, condition, lead time, and final configuration are subject to confirmation by the supplier at the time of inquiry. Photographs, inspection reports, and detailed specifications of the actual available equipment can be provided to qualified buyers upon request.
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